Semiconductor devices : physics and technology

S.M Sze, 著LeeMing-Kwei, 著SzeSimonM., 著LeeM.K.(Ming-Kwei)

Semiconductor Devices: Physics and Technology, Third Edition is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices.

出版社

Wiley

発売日

2013-01-01

ISBN

9780470873670